8/24/2012	11:02:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2012	11:02:34 AM	Recipe started at 11:02 AM
8/24/2012	11:02:34 AM	Helium valve closed
8/24/2012	11:02:34 AM	H2 valve closed
8/24/2012	11:02:34 AM	BCl3 valve closed
8/24/2012	11:02:34 AM	PH3 valve closed
8/24/2012	11:02:34 AM	SiCl4 pre valve closed
8/24/2012	11:02:34 AM	SiCl4 post valve closed
8/24/2012	11:02:34 AM	Main Vac valve closed
8/24/2012	11:02:34 AM	Bypass valve closed
8/24/2012	11:02:34 AM	Bubbler valve closed
8/24/2012	11:02:34 AM	Helium MFC set to  0.000000
8/24/2012	11:02:34 AM	H2 MFC set to  0.000000
8/24/2012	11:02:34 AM	BCl3 MFC set to  0.000000
8/24/2012	11:02:34 AM	PH3 MFC set to  0.000000
8/24/2012	11:02:34 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:02:34 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:02:35 AM	Tube furnace set to 0
8/24/2012	11:02:38 AM	H2 valve closed
8/24/2012	11:02:38 AM	BCl3 valve closed
8/24/2012	11:02:38 AM	PH3 valve closed
8/24/2012	11:02:38 AM	SiCl4 pre valve closed
8/24/2012	11:02:38 AM	SiCl4 post valve closed
8/24/2012	11:02:38 AM	Main Vac valve closed
8/24/2012	11:02:38 AM	Bypass valve closed
8/24/2012	11:02:38 AM	Bubbler valve closed
8/24/2012	11:02:38 AM	Helium valve opened
8/24/2012	11:02:38 AM	Helium MFC set to  500.000000
8/24/2012	11:02:38 AM	H2 MFC set to  0.000000
8/24/2012	11:02:38 AM	BCl3 MFC set to  0.000000
8/24/2012	11:02:38 AM	PH3 MFC set to  0.000000
8/24/2012	11:02:38 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:02:38 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:02:38 AM	Tube furnace set to 0
8/24/2012	11:03:50 AM	Helium valve closed
8/24/2012	11:03:50 AM	H2 valve closed
8/24/2012	11:03:50 AM	BCl3 valve closed
8/24/2012	11:03:50 AM	PH3 valve closed
8/24/2012	11:03:50 AM	SiCl4 pre valve closed
8/24/2012	11:03:50 AM	SiCl4 post valve closed
8/24/2012	11:03:50 AM	Main Vac valve closed
8/24/2012	11:03:50 AM	Bypass valve closed
8/24/2012	11:03:50 AM	Bubbler valve closed
8/24/2012	11:03:50 AM	Helium MFC set to  0.000000
8/24/2012	11:03:50 AM	H2 MFC set to  0.000000
8/24/2012	11:03:50 AM	BCl3 MFC set to  0.000000
8/24/2012	11:03:50 AM	PH3 MFC set to  0.000000
8/24/2012	11:03:50 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:03:50 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:03:51 AM	Tube furnace set to 0
8/24/2012	11:03:52 AM	Run finished at 11:03 AM
8/24/2012	11:03:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2012	11:06:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2012	11:06:38 AM	Recipe started at 11:06 AM
8/24/2012	11:06:38 AM	Helium valve closed
8/24/2012	11:06:38 AM	H2 valve closed
8/24/2012	11:06:38 AM	BCl3 valve closed
8/24/2012	11:06:38 AM	PH3 valve closed
8/24/2012	11:06:38 AM	SiCl4 pre valve closed
8/24/2012	11:06:38 AM	SiCl4 post valve closed
8/24/2012	11:06:38 AM	Main Vac valve closed
8/24/2012	11:06:38 AM	Bubbler valve closed
8/24/2012	11:06:38 AM	Bypass valve opened
8/24/2012	11:06:38 AM	Helium MFC set to  0.000000
8/24/2012	11:06:38 AM	H2 MFC set to  0.000000
8/24/2012	11:06:38 AM	BCl3 MFC set to  0.000000
8/24/2012	11:06:38 AM	PH3 MFC set to  0.000000
8/24/2012	11:06:38 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:06:38 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:06:38 AM	Tube furnace set to 0
8/24/2012	11:07:53 AM	Helium valve closed
8/24/2012	11:07:53 AM	H2 valve closed
8/24/2012	11:07:53 AM	BCl3 valve closed
8/24/2012	11:07:53 AM	PH3 valve closed
8/24/2012	11:07:53 AM	SiCl4 pre valve closed
8/24/2012	11:07:53 AM	SiCl4 post valve closed
8/24/2012	11:07:53 AM	Main Vac valve closed
8/24/2012	11:07:53 AM	Bubbler valve closed
8/24/2012	11:07:53 AM	Bypass valve opened
8/24/2012	11:07:53 AM	Helium MFC set to  0.000000
8/24/2012	11:07:53 AM	H2 MFC set to  0.000000
8/24/2012	11:07:53 AM	BCl3 MFC set to  0.000000
8/24/2012	11:07:53 AM	PH3 MFC set to  0.000000
8/24/2012	11:07:53 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:07:53 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:07:53 AM	Tube furnace set to 0
8/24/2012	11:08:53 AM	Helium valve closed
8/24/2012	11:08:53 AM	H2 valve closed
8/24/2012	11:08:53 AM	BCl3 valve closed
8/24/2012	11:08:53 AM	PH3 valve closed
8/24/2012	11:08:53 AM	SiCl4 pre valve closed
8/24/2012	11:08:53 AM	SiCl4 post valve closed
8/24/2012	11:08:53 AM	Bypass valve closed
8/24/2012	11:08:53 AM	Bubbler valve closed
8/24/2012	11:08:54 AM	Main Vac valve opened
8/24/2012	11:08:54 AM	Helium MFC set to  0.000000
8/24/2012	11:08:54 AM	H2 MFC set to  0.000000
8/24/2012	11:08:54 AM	BCl3 MFC set to  0.000000
8/24/2012	11:08:54 AM	PH3 MFC set to  0.000000
8/24/2012	11:08:54 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:08:54 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:08:54 AM	Tube furnace set to 0
8/24/2012	11:08:55 AM	Run finished at 11:08 AM
8/24/2012	11:08:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2012	11:13:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2012	11:13:35 AM	Recipe started at 11:13 AM
8/24/2012	11:13:35 AM	Helium valve closed
8/24/2012	11:13:35 AM	H2 valve closed
8/24/2012	11:13:35 AM	BCl3 valve closed
8/24/2012	11:13:35 AM	PH3 valve closed
8/24/2012	11:13:35 AM	SiCl4 pre valve closed
8/24/2012	11:13:35 AM	SiCl4 post valve closed
8/24/2012	11:13:35 AM	Main Vac valve closed
8/24/2012	11:13:35 AM	Bypass valve closed
8/24/2012	11:13:35 AM	Bubbler valve closed
8/24/2012	11:13:35 AM	Helium MFC set to  0.000000
8/24/2012	11:13:35 AM	H2 MFC set to  0.000000
8/24/2012	11:13:35 AM	BCl3 MFC set to  0.000000
8/24/2012	11:13:35 AM	PH3 MFC set to  0.000000
8/24/2012	11:13:35 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:13:36 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:13:36 AM	Tube furnace set to 0
8/24/2012	11:13:39 AM	H2 valve closed
8/24/2012	11:13:39 AM	BCl3 valve closed
8/24/2012	11:13:39 AM	PH3 valve closed
8/24/2012	11:13:39 AM	SiCl4 pre valve closed
8/24/2012	11:13:39 AM	SiCl4 post valve closed
8/24/2012	11:13:39 AM	Main Vac valve closed
8/24/2012	11:13:39 AM	Bypass valve closed
8/24/2012	11:13:39 AM	Bubbler valve closed
8/24/2012	11:13:39 AM	Helium valve opened
8/24/2012	11:13:39 AM	Helium MFC set to  500.000000
8/24/2012	11:13:39 AM	H2 MFC set to  0.000000
8/24/2012	11:13:39 AM	BCl3 MFC set to  0.000000
8/24/2012	11:13:39 AM	PH3 MFC set to  0.000000
8/24/2012	11:13:39 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:13:39 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:13:39 AM	Tube furnace set to 0
8/24/2012	11:14:52 AM	Helium valve closed
8/24/2012	11:14:52 AM	H2 valve closed
8/24/2012	11:14:52 AM	BCl3 valve closed
8/24/2012	11:14:52 AM	PH3 valve closed
8/24/2012	11:14:52 AM	SiCl4 pre valve closed
8/24/2012	11:14:52 AM	SiCl4 post valve closed
8/24/2012	11:14:52 AM	Main Vac valve closed
8/24/2012	11:14:52 AM	Bypass valve closed
8/24/2012	11:14:52 AM	Bubbler valve closed
8/24/2012	11:14:52 AM	Helium MFC set to  0.000000
8/24/2012	11:14:52 AM	H2 MFC set to  0.000000
8/24/2012	11:14:52 AM	BCl3 MFC set to  0.000000
8/24/2012	11:14:52 AM	PH3 MFC set to  0.000000
8/24/2012	11:14:52 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:14:52 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:14:53 AM	Tube furnace set to 0
8/24/2012	11:14:54 AM	Run finished at 11:14 AM
8/24/2012	11:14:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2012	11:17:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2012	11:17:10 AM	Recipe started at 11:17 AM
8/24/2012	11:17:10 AM	Helium valve closed
8/24/2012	11:17:10 AM	H2 valve closed
8/24/2012	11:17:10 AM	BCl3 valve closed
8/24/2012	11:17:11 AM	PH3 valve closed
8/24/2012	11:17:11 AM	SiCl4 pre valve closed
8/24/2012	11:17:11 AM	SiCl4 post valve closed
8/24/2012	11:17:11 AM	Main Vac valve closed
8/24/2012	11:17:11 AM	Bubbler valve closed
8/24/2012	11:17:11 AM	Bypass valve opened
8/24/2012	11:17:11 AM	Helium MFC set to  0.000000
8/24/2012	11:17:11 AM	H2 MFC set to  0.000000
8/24/2012	11:17:11 AM	BCl3 MFC set to  0.000000
8/24/2012	11:17:11 AM	PH3 MFC set to  0.000000
8/24/2012	11:17:11 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:17:11 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:17:11 AM	Tube furnace set to 0
8/24/2012	11:18:28 AM	Helium valve closed
8/24/2012	11:18:28 AM	H2 valve closed
8/24/2012	11:18:28 AM	BCl3 valve closed
8/24/2012	11:18:28 AM	PH3 valve closed
8/24/2012	11:18:28 AM	SiCl4 pre valve closed
8/24/2012	11:18:28 AM	SiCl4 post valve closed
8/24/2012	11:18:28 AM	Main Vac valve closed
8/24/2012	11:18:28 AM	Bubbler valve closed
8/24/2012	11:18:28 AM	Bypass valve opened
8/24/2012	11:18:28 AM	Helium MFC set to  0.000000
8/24/2012	11:18:28 AM	H2 MFC set to  0.000000
8/24/2012	11:18:28 AM	BCl3 MFC set to  0.000000
8/24/2012	11:18:28 AM	PH3 MFC set to  0.000000
8/24/2012	11:18:28 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:18:28 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:18:28 AM	Tube furnace set to 0
8/24/2012	11:19:28 AM	Helium valve closed
8/24/2012	11:19:28 AM	H2 valve closed
8/24/2012	11:19:28 AM	BCl3 valve closed
8/24/2012	11:19:28 AM	PH3 valve closed
8/24/2012	11:19:28 AM	SiCl4 pre valve closed
8/24/2012	11:19:28 AM	SiCl4 post valve closed
8/24/2012	11:19:28 AM	Bypass valve closed
8/24/2012	11:19:28 AM	Bubbler valve closed
8/24/2012	11:19:28 AM	Main Vac valve opened
8/24/2012	11:19:28 AM	Helium MFC set to  0.000000
8/24/2012	11:19:28 AM	H2 MFC set to  0.000000
8/24/2012	11:19:29 AM	BCl3 MFC set to  0.000000
8/24/2012	11:19:29 AM	PH3 MFC set to  0.000000
8/24/2012	11:19:29 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:19:29 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:19:29 AM	Tube furnace set to 0
8/24/2012	11:19:30 AM	Run finished at 11:19 AM
8/24/2012	11:19:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2012	11:40:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/24/2012	11:41:04 AM	Recipe started at 11:40 AM
8/24/2012	11:41:04 AM	Helium valve closed
8/24/2012	11:41:04 AM	H2 valve closed
8/24/2012	11:41:04 AM	BCl3 valve closed
8/24/2012	11:41:04 AM	PH3 valve closed
8/24/2012	11:41:04 AM	SiCl4 pre valve closed
8/24/2012	11:41:04 AM	SiCl4 post valve closed
8/24/2012	11:41:04 AM	Main Vac valve closed
8/24/2012	11:41:04 AM	Bubbler valve closed
8/24/2012	11:41:04 AM	Bypass valve opened
8/24/2012	11:41:04 AM	Helium MFC set to  0.000000
8/24/2012	11:41:04 AM	H2 MFC set to  0.000000
8/24/2012	11:41:04 AM	BCl3 MFC set to  0.000000
8/24/2012	11:41:04 AM	PH3 MFC set to  0.000000
8/24/2012	11:41:04 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:41:04 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:41:04 AM	Tube furnace set to 0
8/24/2012	11:41:05 AM	Helium valve closed
8/24/2012	11:41:05 AM	H2 valve closed
8/24/2012	11:41:05 AM	BCl3 valve closed
8/24/2012	11:41:05 AM	PH3 valve closed
8/24/2012	11:41:05 AM	SiCl4 pre valve closed
8/24/2012	11:41:05 AM	SiCl4 post valve closed
8/24/2012	11:41:05 AM	Main Vac valve closed
8/24/2012	11:41:05 AM	Bubbler valve closed
8/24/2012	11:41:05 AM	Bypass valve opened
8/24/2012	11:41:05 AM	Helium MFC set to  0.000000
8/24/2012	11:41:05 AM	H2 MFC set to  0.000000
8/24/2012	11:41:05 AM	BCl3 MFC set to  0.000000
8/24/2012	11:41:05 AM	PH3 MFC set to  0.000000
8/24/2012	11:41:05 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:41:05 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:41:05 AM	Tube furnace set to 0
8/24/2012	11:41:05 AM	Helium valve closed
8/24/2012	11:41:05 AM	H2 valve closed
8/24/2012	11:41:05 AM	BCl3 valve closed
8/24/2012	11:41:05 AM	PH3 valve closed
8/24/2012	11:41:05 AM	SiCl4 pre valve closed
8/24/2012	11:41:05 AM	SiCl4 post valve closed
8/24/2012	11:41:05 AM	Bypass valve closed
8/24/2012	11:41:05 AM	Bubbler valve closed
8/24/2012	11:41:05 AM	Main Vac valve opened
8/24/2012	11:41:05 AM	Helium MFC set to  0.000000
8/24/2012	11:41:05 AM	H2 MFC set to  0.000000
8/24/2012	11:41:05 AM	BCl3 MFC set to  0.000000
8/24/2012	11:41:05 AM	PH3 MFC set to  0.000000
8/24/2012	11:41:05 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:41:05 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:41:05 AM	Tube furnace set to 0
8/24/2012	11:41:06 AM	H2 valve closed
8/24/2012	11:41:06 AM	BCl3 valve closed
8/24/2012	11:41:06 AM	PH3 valve closed
8/24/2012	11:41:06 AM	SiCl4 pre valve closed
8/24/2012	11:41:06 AM	SiCl4 post valve closed
8/24/2012	11:41:06 AM	Bypass valve closed
8/24/2012	11:41:06 AM	Bubbler valve closed
8/24/2012	11:41:06 AM	Helium valve opened
8/24/2012	11:41:06 AM	Main Vac valve opened
8/24/2012	11:41:06 AM	Helium MFC set to  20.000000
8/24/2012	11:41:06 AM	H2 MFC set to  0.000000
8/24/2012	11:41:06 AM	BCl3 MFC set to  0.000000
8/24/2012	11:41:06 AM	PH3 MFC set to  0.000000
8/24/2012	11:41:06 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:41:06 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:41:06 AM	Tube furnace set to 0
8/24/2012	11:41:36 AM	Helium valve closed
8/24/2012	11:41:36 AM	H2 valve closed
8/24/2012	11:41:36 AM	BCl3 valve closed
8/24/2012	11:41:36 AM	PH3 valve closed
8/24/2012	11:41:36 AM	SiCl4 pre valve closed
8/24/2012	11:41:36 AM	SiCl4 post valve closed
8/24/2012	11:41:36 AM	Bypass valve closed
8/24/2012	11:41:36 AM	Bubbler valve closed
8/24/2012	11:41:36 AM	Main Vac valve opened
8/24/2012	11:41:36 AM	Helium MFC set to  0.000000
8/24/2012	11:41:36 AM	H2 MFC set to  0.000000
8/24/2012	11:41:36 AM	BCl3 MFC set to  0.000000
8/24/2012	11:41:36 AM	PH3 MFC set to  0.000000
8/24/2012	11:41:36 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:41:36 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:41:36 AM	Tube furnace set to 0
8/24/2012	11:42:06 AM	H2 valve closed
8/24/2012	11:42:06 AM	BCl3 valve closed
8/24/2012	11:42:06 AM	PH3 valve closed
8/24/2012	11:42:06 AM	SiCl4 pre valve closed
8/24/2012	11:42:06 AM	SiCl4 post valve closed
8/24/2012	11:42:06 AM	Bypass valve closed
8/24/2012	11:42:06 AM	Bubbler valve closed
8/24/2012	11:42:06 AM	Helium valve opened
8/24/2012	11:42:06 AM	Main Vac valve opened
8/24/2012	11:42:06 AM	Helium MFC set to  20.000000
8/24/2012	11:42:06 AM	H2 MFC set to  0.000000
8/24/2012	11:42:06 AM	BCl3 MFC set to  0.000000
8/24/2012	11:42:06 AM	PH3 MFC set to  0.000000
8/24/2012	11:42:06 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:42:06 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:42:06 AM	Tube furnace set to 0
8/24/2012	11:42:36 AM	Helium valve closed
8/24/2012	11:42:36 AM	H2 valve closed
8/24/2012	11:42:36 AM	BCl3 valve closed
8/24/2012	11:42:36 AM	PH3 valve closed
8/24/2012	11:42:36 AM	SiCl4 pre valve closed
8/24/2012	11:42:36 AM	SiCl4 post valve closed
8/24/2012	11:42:36 AM	Bypass valve closed
8/24/2012	11:42:36 AM	Bubbler valve closed
8/24/2012	11:42:36 AM	Main Vac valve opened
8/24/2012	11:42:36 AM	Helium MFC set to  0.000000
8/24/2012	11:42:36 AM	H2 MFC set to  0.000000
8/24/2012	11:42:36 AM	BCl3 MFC set to  0.000000
8/24/2012	11:42:36 AM	PH3 MFC set to  0.000000
8/24/2012	11:42:36 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:42:36 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:42:36 AM	Tube furnace set to 0
8/24/2012	11:43:06 AM	H2 valve closed
8/24/2012	11:43:06 AM	BCl3 valve closed
8/24/2012	11:43:06 AM	PH3 valve closed
8/24/2012	11:43:06 AM	SiCl4 pre valve closed
8/24/2012	11:43:06 AM	SiCl4 post valve closed
8/24/2012	11:43:07 AM	Bypass valve closed
8/24/2012	11:43:07 AM	Bubbler valve closed
8/24/2012	11:43:07 AM	Helium valve opened
8/24/2012	11:43:07 AM	Main Vac valve opened
8/24/2012	11:43:07 AM	Helium MFC set to  20.000000
8/24/2012	11:43:07 AM	H2 MFC set to  0.000000
8/24/2012	11:43:07 AM	BCl3 MFC set to  0.000000
8/24/2012	11:43:07 AM	PH3 MFC set to  0.000000
8/24/2012	11:43:07 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:43:07 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:43:07 AM	Tube furnace set to 0
8/24/2012	11:43:37 AM	Helium valve closed
8/24/2012	11:43:37 AM	H2 valve closed
8/24/2012	11:43:37 AM	BCl3 valve closed
8/24/2012	11:43:37 AM	PH3 valve closed
8/24/2012	11:43:37 AM	SiCl4 pre valve closed
8/24/2012	11:43:37 AM	SiCl4 post valve closed
8/24/2012	11:43:37 AM	Bypass valve closed
8/24/2012	11:43:37 AM	Bubbler valve closed
8/24/2012	11:43:37 AM	Main Vac valve opened
8/24/2012	11:43:37 AM	Helium MFC set to  0.000000
8/24/2012	11:43:37 AM	H2 MFC set to  0.000000
8/24/2012	11:43:37 AM	BCl3 MFC set to  0.000000
8/24/2012	11:43:37 AM	PH3 MFC set to  0.000000
8/24/2012	11:43:37 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:43:37 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:43:37 AM	Tube furnace set to 0
8/24/2012	11:44:07 AM	H2 valve closed
8/24/2012	11:44:07 AM	BCl3 valve closed
8/24/2012	11:44:07 AM	PH3 valve closed
8/24/2012	11:44:07 AM	SiCl4 pre valve closed
8/24/2012	11:44:07 AM	SiCl4 post valve closed
8/24/2012	11:44:07 AM	Bypass valve closed
8/24/2012	11:44:07 AM	Bubbler valve closed
8/24/2012	11:44:07 AM	Helium valve opened
8/24/2012	11:44:07 AM	Main Vac valve opened
8/24/2012	11:44:07 AM	Helium MFC set to  20.000000
8/24/2012	11:44:07 AM	H2 MFC set to  0.000000
8/24/2012	11:44:07 AM	BCl3 MFC set to  0.000000
8/24/2012	11:44:07 AM	PH3 MFC set to  0.000000
8/24/2012	11:44:07 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:44:07 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:44:07 AM	Tube furnace set to 0
8/24/2012	11:44:37 AM	Helium valve closed
8/24/2012	11:44:37 AM	H2 valve closed
8/24/2012	11:44:37 AM	BCl3 valve closed
8/24/2012	11:44:37 AM	PH3 valve closed
8/24/2012	11:44:37 AM	SiCl4 pre valve closed
8/24/2012	11:44:37 AM	SiCl4 post valve closed
8/24/2012	11:44:37 AM	Bypass valve closed
8/24/2012	11:44:37 AM	Bubbler valve closed
8/24/2012	11:44:37 AM	Main Vac valve opened
8/24/2012	11:44:37 AM	Helium MFC set to  0.000000
8/24/2012	11:44:37 AM	H2 MFC set to  0.000000
8/24/2012	11:44:37 AM	BCl3 MFC set to  0.000000
8/24/2012	11:44:37 AM	PH3 MFC set to  0.000000
8/24/2012	11:44:37 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:44:37 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:44:37 AM	Tube furnace set to 0
8/24/2012	11:45:07 AM	H2 valve closed
8/24/2012	11:45:07 AM	BCl3 valve closed
8/24/2012	11:45:07 AM	PH3 valve closed
8/24/2012	11:45:07 AM	SiCl4 pre valve closed
8/24/2012	11:45:07 AM	SiCl4 post valve closed
8/24/2012	11:45:07 AM	Bypass valve closed
8/24/2012	11:45:07 AM	Bubbler valve closed
8/24/2012	11:45:07 AM	Helium valve opened
8/24/2012	11:45:07 AM	Main Vac valve opened
8/24/2012	11:45:07 AM	Helium MFC set to  20.000000
8/24/2012	11:45:07 AM	H2 MFC set to  0.000000
8/24/2012	11:45:07 AM	BCl3 MFC set to  0.000000
8/24/2012	11:45:07 AM	PH3 MFC set to  0.000000
8/24/2012	11:45:07 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:45:07 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:45:08 AM	Tube furnace set to 0
8/24/2012	11:45:38 AM	Helium valve closed
8/24/2012	11:45:38 AM	H2 valve closed
8/24/2012	11:45:38 AM	BCl3 valve closed
8/24/2012	11:45:38 AM	PH3 valve closed
8/24/2012	11:45:38 AM	SiCl4 pre valve closed
8/24/2012	11:45:38 AM	SiCl4 post valve closed
8/24/2012	11:45:38 AM	Bypass valve closed
8/24/2012	11:45:38 AM	Bubbler valve closed
8/24/2012	11:45:38 AM	Main Vac valve opened
8/24/2012	11:45:38 AM	Helium MFC set to  0.000000
8/24/2012	11:45:38 AM	H2 MFC set to  0.000000
8/24/2012	11:45:38 AM	BCl3 MFC set to  0.000000
8/24/2012	11:45:38 AM	PH3 MFC set to  0.000000
8/24/2012	11:45:38 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:45:38 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:45:38 AM	Tube furnace set to 0
8/24/2012	11:46:08 AM	H2 valve closed
8/24/2012	11:46:08 AM	BCl3 valve closed
8/24/2012	11:46:08 AM	PH3 valve closed
8/24/2012	11:46:08 AM	SiCl4 pre valve closed
8/24/2012	11:46:08 AM	SiCl4 post valve closed
8/24/2012	11:46:08 AM	Bypass valve closed
8/24/2012	11:46:08 AM	Bubbler valve closed
8/24/2012	11:46:08 AM	Helium valve opened
8/24/2012	11:46:08 AM	Main Vac valve opened
8/24/2012	11:46:08 AM	Helium MFC set to  20.000000
8/24/2012	11:46:08 AM	H2 MFC set to  0.000000
8/24/2012	11:46:08 AM	BCl3 MFC set to  0.000000
8/24/2012	11:46:08 AM	PH3 MFC set to  0.000000
8/24/2012	11:46:08 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:46:08 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:46:08 AM	Tube furnace set to 0
8/24/2012	11:46:38 AM	Helium valve closed
8/24/2012	11:46:38 AM	H2 valve closed
8/24/2012	11:46:38 AM	BCl3 valve closed
8/24/2012	11:46:38 AM	PH3 valve closed
8/24/2012	11:46:38 AM	SiCl4 pre valve closed
8/24/2012	11:46:38 AM	SiCl4 post valve closed
8/24/2012	11:46:38 AM	Bypass valve closed
8/24/2012	11:46:38 AM	Bubbler valve closed
8/24/2012	11:46:38 AM	Main Vac valve opened
8/24/2012	11:46:38 AM	Helium MFC set to  0.000000
8/24/2012	11:46:38 AM	H2 MFC set to  0.000000
8/24/2012	11:46:38 AM	BCl3 MFC set to  0.000000
8/24/2012	11:46:38 AM	PH3 MFC set to  0.000000
8/24/2012	11:46:38 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:46:38 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:46:38 AM	Tube furnace set to 0
8/24/2012	11:47:08 AM	H2 valve closed
8/24/2012	11:47:08 AM	BCl3 valve closed
8/24/2012	11:47:08 AM	PH3 valve closed
8/24/2012	11:47:08 AM	SiCl4 pre valve closed
8/24/2012	11:47:08 AM	SiCl4 post valve closed
8/24/2012	11:47:08 AM	Bypass valve closed
8/24/2012	11:47:08 AM	Bubbler valve closed
8/24/2012	11:47:08 AM	Helium valve opened
8/24/2012	11:47:08 AM	Main Vac valve opened
8/24/2012	11:47:08 AM	Helium MFC set to  20.000000
8/24/2012	11:47:08 AM	H2 MFC set to  0.000000
8/24/2012	11:47:08 AM	BCl3 MFC set to  0.000000
8/24/2012	11:47:08 AM	PH3 MFC set to  0.000000
8/24/2012	11:47:08 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:47:08 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:47:09 AM	Tube furnace set to 0
8/24/2012	11:47:39 AM	Helium valve closed
8/24/2012	11:47:39 AM	H2 valve closed
8/24/2012	11:47:39 AM	BCl3 valve closed
8/24/2012	11:47:39 AM	PH3 valve closed
8/24/2012	11:47:39 AM	SiCl4 pre valve closed
8/24/2012	11:47:39 AM	SiCl4 post valve closed
8/24/2012	11:47:39 AM	Bypass valve closed
8/24/2012	11:47:39 AM	Bubbler valve closed
8/24/2012	11:47:39 AM	Main Vac valve opened
8/24/2012	11:47:39 AM	Helium MFC set to  0.000000
8/24/2012	11:47:39 AM	H2 MFC set to  0.000000
8/24/2012	11:47:39 AM	BCl3 MFC set to  0.000000
8/24/2012	11:47:39 AM	PH3 MFC set to  0.000000
8/24/2012	11:47:39 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:47:39 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:47:39 AM	Tube furnace set to 0
8/24/2012	11:48:09 AM	H2 valve closed
8/24/2012	11:48:09 AM	BCl3 valve closed
8/24/2012	11:48:09 AM	PH3 valve closed
8/24/2012	11:48:09 AM	SiCl4 pre valve closed
8/24/2012	11:48:09 AM	SiCl4 post valve closed
8/24/2012	11:48:09 AM	Bypass valve closed
8/24/2012	11:48:09 AM	Bubbler valve closed
8/24/2012	11:48:09 AM	Helium valve opened
8/24/2012	11:48:09 AM	Main Vac valve opened
8/24/2012	11:48:09 AM	Helium MFC set to  20.000000
8/24/2012	11:48:09 AM	H2 MFC set to  0.000000
8/24/2012	11:48:09 AM	BCl3 MFC set to  0.000000
8/24/2012	11:48:09 AM	PH3 MFC set to  0.000000
8/24/2012	11:48:09 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:48:09 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:48:09 AM	Tube furnace set to 0
8/24/2012	11:48:39 AM	Helium valve closed
8/24/2012	11:48:39 AM	H2 valve closed
8/24/2012	11:48:39 AM	BCl3 valve closed
8/24/2012	11:48:39 AM	PH3 valve closed
8/24/2012	11:48:39 AM	SiCl4 pre valve closed
8/24/2012	11:48:39 AM	SiCl4 post valve closed
8/24/2012	11:48:39 AM	Bypass valve closed
8/24/2012	11:48:39 AM	Bubbler valve closed
8/24/2012	11:48:39 AM	Main Vac valve opened
8/24/2012	11:48:39 AM	Helium MFC set to  0.000000
8/24/2012	11:48:39 AM	H2 MFC set to  0.000000
8/24/2012	11:48:39 AM	BCl3 MFC set to  0.000000
8/24/2012	11:48:39 AM	PH3 MFC set to  0.000000
8/24/2012	11:48:39 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:48:39 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:48:39 AM	Tube furnace set to 0
8/24/2012	11:49:09 AM	H2 valve closed
8/24/2012	11:49:09 AM	BCl3 valve closed
8/24/2012	11:49:09 AM	PH3 valve closed
8/24/2012	11:49:09 AM	SiCl4 pre valve closed
8/24/2012	11:49:09 AM	SiCl4 post valve closed
8/24/2012	11:49:09 AM	Bypass valve closed
8/24/2012	11:49:09 AM	Bubbler valve closed
8/24/2012	11:49:09 AM	Helium valve opened
8/24/2012	11:49:09 AM	Main Vac valve opened
8/24/2012	11:49:09 AM	Helium MFC set to  20.000000
8/24/2012	11:49:09 AM	H2 MFC set to  0.000000
8/24/2012	11:49:09 AM	BCl3 MFC set to  0.000000
8/24/2012	11:49:09 AM	PH3 MFC set to  0.000000
8/24/2012	11:49:09 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:49:09 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:49:10 AM	Tube furnace set to 0
8/24/2012	11:49:40 AM	Helium valve closed
8/24/2012	11:49:40 AM	H2 valve closed
8/24/2012	11:49:40 AM	BCl3 valve closed
8/24/2012	11:49:40 AM	PH3 valve closed
8/24/2012	11:49:40 AM	SiCl4 pre valve closed
8/24/2012	11:49:40 AM	SiCl4 post valve closed
8/24/2012	11:49:40 AM	Bypass valve closed
8/24/2012	11:49:40 AM	Bubbler valve closed
8/24/2012	11:49:40 AM	Main Vac valve opened
8/24/2012	11:49:40 AM	Helium MFC set to  0.000000
8/24/2012	11:49:40 AM	H2 MFC set to  0.000000
8/24/2012	11:49:40 AM	BCl3 MFC set to  0.000000
8/24/2012	11:49:40 AM	PH3 MFC set to  0.000000
8/24/2012	11:49:40 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:49:40 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:49:40 AM	Tube furnace set to 0
8/24/2012	11:50:10 AM	H2 valve closed
8/24/2012	11:50:10 AM	BCl3 valve closed
8/24/2012	11:50:10 AM	PH3 valve closed
8/24/2012	11:50:10 AM	SiCl4 pre valve closed
8/24/2012	11:50:10 AM	SiCl4 post valve closed
8/24/2012	11:50:10 AM	Bypass valve closed
8/24/2012	11:50:10 AM	Bubbler valve closed
8/24/2012	11:50:10 AM	Helium valve opened
8/24/2012	11:50:10 AM	Main Vac valve opened
8/24/2012	11:50:10 AM	Helium MFC set to  20.000000
8/24/2012	11:50:10 AM	H2 MFC set to  0.000000
8/24/2012	11:50:10 AM	BCl3 MFC set to  0.000000
8/24/2012	11:50:10 AM	PH3 MFC set to  0.000000
8/24/2012	11:50:10 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:50:10 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:50:10 AM	Tube furnace set to 0
8/24/2012	11:50:40 AM	Helium valve closed
8/24/2012	11:50:40 AM	H2 valve closed
8/24/2012	11:50:40 AM	BCl3 valve closed
8/24/2012	11:50:40 AM	PH3 valve closed
8/24/2012	11:50:40 AM	SiCl4 pre valve closed
8/24/2012	11:50:40 AM	SiCl4 post valve closed
8/24/2012	11:50:40 AM	Bypass valve closed
8/24/2012	11:50:40 AM	Bubbler valve closed
8/24/2012	11:50:40 AM	Main Vac valve opened
8/24/2012	11:50:40 AM	Helium MFC set to  0.000000
8/24/2012	11:50:40 AM	H2 MFC set to  0.000000
8/24/2012	11:50:40 AM	BCl3 MFC set to  0.000000
8/24/2012	11:50:40 AM	PH3 MFC set to  0.000000
8/24/2012	11:50:40 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:50:40 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:50:40 AM	Tube furnace set to 0
8/24/2012	11:50:41 AM	Run finished at 11:50 AM
8/24/2012	11:50:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/24/2012	11:51:19 AM	Recipe started at 11:51 AM
8/24/2012	11:51:19 AM	Helium valve closed
8/24/2012	11:51:20 AM	H2 valve closed
8/24/2012	11:51:20 AM	BCl3 valve closed
8/24/2012	11:51:20 AM	PH3 valve closed
8/24/2012	11:51:20 AM	SiCl4 pre valve closed
8/24/2012	11:51:20 AM	SiCl4 post valve closed
8/24/2012	11:51:20 AM	Main Vac valve closed
8/24/2012	11:51:20 AM	Bypass valve closed
8/24/2012	11:51:20 AM	Bubbler valve closed
8/24/2012	11:51:20 AM	Helium MFC set to  0.000000
8/24/2012	11:51:20 AM	H2 MFC set to  0.000000
8/24/2012	11:51:20 AM	BCl3 MFC set to  0.000000
8/24/2012	11:51:20 AM	PH3 MFC set to  0.000000
8/24/2012	11:51:20 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:51:20 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:51:20 AM	Tube furnace set to 0
8/24/2012	11:51:23 AM	Helium valve closed
8/24/2012	11:51:23 AM	BCl3 valve closed
8/24/2012	11:51:23 AM	PH3 valve closed
8/24/2012	11:51:23 AM	SiCl4 pre valve closed
8/24/2012	11:51:23 AM	SiCl4 post valve closed
8/24/2012	11:51:23 AM	Main Vac valve closed
8/24/2012	11:51:23 AM	Bypass valve closed
8/24/2012	11:51:23 AM	Bubbler valve closed
8/24/2012	11:51:23 AM	H2 valve opened
8/24/2012	11:51:23 AM	Helium MFC set to  0.000000
8/24/2012	11:51:23 AM	H2 MFC set to  500.000000
8/24/2012	11:51:23 AM	BCl3 MFC set to  0.000000
8/24/2012	11:51:23 AM	PH3 MFC set to  0.000000
8/24/2012	11:51:23 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:51:23 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:51:23 AM	Tube furnace set to 0
8/24/2012	11:52:39 AM	Helium valve closed
8/24/2012	11:52:39 AM	BCl3 valve closed
8/24/2012	11:52:39 AM	PH3 valve closed
8/24/2012	11:52:39 AM	SiCl4 pre valve closed
8/24/2012	11:52:39 AM	SiCl4 post valve closed
8/24/2012	11:52:39 AM	Main Vac valve closed
8/24/2012	11:52:39 AM	Bypass valve closed
8/24/2012	11:52:39 AM	H2 valve opened
8/24/2012	11:52:39 AM	Bubbler valve opened
8/24/2012	11:52:39 AM	Helium MFC set to  0.000000
8/24/2012	11:52:39 AM	H2 MFC set to  500.000000
8/24/2012	11:52:39 AM	BCl3 MFC set to  0.000000
8/24/2012	11:52:39 AM	PH3 MFC set to  0.000000
8/24/2012	11:52:39 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:52:39 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:52:39 AM	Tube furnace set to 0
8/24/2012	11:52:40 AM	Helium valve closed
8/24/2012	11:52:40 AM	BCl3 valve closed
8/24/2012	11:52:40 AM	PH3 valve closed
8/24/2012	11:52:40 AM	SiCl4 pre valve closed
8/24/2012	11:52:40 AM	SiCl4 post valve closed
8/24/2012	11:52:40 AM	Main Vac valve closed
8/24/2012	11:52:40 AM	Bypass valve closed
8/24/2012	11:52:40 AM	H2 valve opened
8/24/2012	11:52:40 AM	Bubbler valve opened
8/24/2012	11:52:40 AM	Helium MFC set to  0.000000
8/24/2012	11:52:41 AM	H2 MFC set to  500.000000
8/24/2012	11:52:41 AM	BCl3 MFC set to  0.000000
8/24/2012	11:52:41 AM	PH3 MFC set to  0.000000
8/24/2012	11:52:41 AM	SiCl4 MFC set to  0.000000
8/24/2012	11:52:41 AM	Bypass solenoid MFC set to  0.000000
8/24/2012	11:52:41 AM	Tube furnace set to 1000
8/24/2012	12:12:41 PM	Helium valve closed
8/24/2012	12:12:41 PM	PH3 valve closed
8/24/2012	12:12:41 PM	Main Vac valve closed
8/24/2012	12:12:41 PM	Bypass valve closed
8/24/2012	12:12:41 PM	H2 valve opened
8/24/2012	12:12:41 PM	BCl3 valve opened
8/24/2012	12:12:41 PM	SiCl4 pre valve opened
8/24/2012	12:12:41 PM	SiCl4 post valve opened
8/24/2012	12:12:41 PM	Bubbler valve opened
8/24/2012	12:12:41 PM	Helium MFC set to  0.000000
8/24/2012	12:12:41 PM	H2 MFC set to  450.000000
8/24/2012	12:12:41 PM	BCl3 MFC set to  1.300000
8/24/2012	12:12:41 PM	PH3 MFC set to  0.000000
8/24/2012	12:12:41 PM	SiCl4 MFC set to  50.000000
8/24/2012	12:12:41 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	12:12:41 PM	Tube furnace set to 1000
8/24/2012	12:29:41 PM	Helium valve closed
8/24/2012	12:29:41 PM	BCl3 valve closed
8/24/2012	12:29:41 PM	PH3 valve closed
8/24/2012	12:29:41 PM	SiCl4 pre valve closed
8/24/2012	12:29:41 PM	SiCl4 post valve closed
8/24/2012	12:29:41 PM	Main Vac valve closed
8/24/2012	12:29:41 PM	Bypass valve closed
8/24/2012	12:29:41 PM	H2 valve opened
8/24/2012	12:29:41 PM	Bubbler valve opened
8/24/2012	12:29:41 PM	Helium MFC set to  0.000000
8/24/2012	12:29:41 PM	H2 MFC set to  500.000000
8/24/2012	12:29:41 PM	BCl3 MFC set to  0.000000
8/24/2012	12:29:41 PM	PH3 MFC set to  0.000000
8/24/2012	12:29:41 PM	SiCl4 MFC set to  0.000000
8/24/2012	12:29:41 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	12:29:41 PM	Tube furnace set to 750
8/24/2012	12:34:41 PM	H2 valve closed
8/24/2012	12:34:41 PM	BCl3 valve closed
8/24/2012	12:34:41 PM	PH3 valve closed
8/24/2012	12:34:41 PM	SiCl4 pre valve closed
8/24/2012	12:34:41 PM	SiCl4 post valve closed
8/24/2012	12:34:41 PM	Main Vac valve closed
8/24/2012	12:34:41 PM	Bypass valve closed
8/24/2012	12:34:41 PM	Helium valve opened
8/24/2012	12:34:41 PM	Bubbler valve opened
8/24/2012	12:34:41 PM	Helium MFC set to  500.000000
8/24/2012	12:34:41 PM	H2 MFC set to  0.000000
8/24/2012	12:34:41 PM	BCl3 MFC set to  0.000000
8/24/2012	12:34:41 PM	PH3 MFC set to  0.000000
8/24/2012	12:34:41 PM	SiCl4 MFC set to  0.000000
8/24/2012	12:34:41 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	12:34:41 PM	Tube furnace set to 0
8/24/2012	12:54:41 PM	Helium valve closed
8/24/2012	12:54:41 PM	H2 valve closed
8/24/2012	12:54:41 PM	BCl3 valve closed
8/24/2012	12:54:41 PM	PH3 valve closed
8/24/2012	12:54:41 PM	SiCl4 pre valve closed
8/24/2012	12:54:41 PM	SiCl4 post valve closed
8/24/2012	12:54:41 PM	Main Vac valve closed
8/24/2012	12:54:41 PM	Bypass valve closed
8/24/2012	12:54:41 PM	Bubbler valve closed
8/24/2012	12:54:41 PM	Helium MFC set to  0.000000
8/24/2012	12:54:41 PM	H2 MFC set to  0.000000
8/24/2012	12:54:41 PM	BCl3 MFC set to  0.000000
8/24/2012	12:54:41 PM	PH3 MFC set to  0.000000
8/24/2012	12:54:41 PM	SiCl4 MFC set to  0.000000
8/24/2012	12:54:41 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	12:54:42 PM	Tube furnace set to 0
8/24/2012	12:54:43 PM	Run finished at 12:54 PM
8/24/2012	1:42:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2012	1:42:03 PM	Recipe started at 1:42 PM
8/24/2012	1:42:03 PM	Helium valve closed
8/24/2012	1:42:03 PM	H2 valve closed
8/24/2012	1:42:03 PM	BCl3 valve closed
8/24/2012	1:42:03 PM	PH3 valve closed
8/24/2012	1:42:03 PM	SiCl4 pre valve closed
8/24/2012	1:42:03 PM	SiCl4 post valve closed
8/24/2012	1:42:03 PM	Main Vac valve closed
8/24/2012	1:42:03 PM	Bypass valve closed
8/24/2012	1:42:03 PM	Bubbler valve closed
8/24/2012	1:42:03 PM	Helium MFC set to  0.000000
8/24/2012	1:42:03 PM	H2 MFC set to  0.000000
8/24/2012	1:42:03 PM	BCl3 MFC set to  0.000000
8/24/2012	1:42:03 PM	PH3 MFC set to  0.000000
8/24/2012	1:42:03 PM	SiCl4 MFC set to  0.000000
8/24/2012	1:42:03 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	1:42:03 PM	Tube furnace set to 0
8/24/2012	1:42:06 PM	H2 valve closed
8/24/2012	1:42:06 PM	BCl3 valve closed
8/24/2012	1:42:06 PM	PH3 valve closed
8/24/2012	1:42:06 PM	SiCl4 pre valve closed
8/24/2012	1:42:06 PM	SiCl4 post valve closed
8/24/2012	1:42:06 PM	Main Vac valve closed
8/24/2012	1:42:06 PM	Bypass valve closed
8/24/2012	1:42:06 PM	Bubbler valve closed
8/24/2012	1:42:07 PM	Helium valve opened
8/24/2012	1:42:07 PM	Helium MFC set to  500.000000
8/24/2012	1:42:07 PM	H2 MFC set to  0.000000
8/24/2012	1:42:07 PM	BCl3 MFC set to  0.000000
8/24/2012	1:42:07 PM	PH3 MFC set to  0.000000
8/24/2012	1:42:07 PM	SiCl4 MFC set to  0.000000
8/24/2012	1:42:07 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	1:42:07 PM	Tube furnace set to 0
8/24/2012	1:42:13 PM	Helium valve closed
8/24/2012	1:42:13 PM	H2 valve closed
8/24/2012	1:42:13 PM	BCl3 valve closed
8/24/2012	1:42:13 PM	PH3 valve closed
8/24/2012	1:42:13 PM	SiCl4 pre valve closed
8/24/2012	1:42:13 PM	SiCl4 post valve closed
8/24/2012	1:42:13 PM	Main Vac valve closed
8/24/2012	1:42:13 PM	Bypass valve closed
8/24/2012	1:42:13 PM	Bubbler valve closed
8/24/2012	1:42:13 PM	Helium MFC set to  0.000000
8/24/2012	1:42:13 PM	H2 MFC set to  0.000000
8/24/2012	1:42:13 PM	BCl3 MFC set to  0.000000
8/24/2012	1:42:13 PM	PH3 MFC set to  0.000000
8/24/2012	1:42:13 PM	SiCl4 MFC set to  0.000000
8/24/2012	1:42:13 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	1:42:13 PM	Tube furnace set to 0
8/24/2012	1:42:14 PM	Run finished at 1:42 PM
8/24/2012	1:42:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2012	1:45:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2012	1:45:15 PM	Recipe started at 1:45 PM
8/24/2012	1:45:15 PM	Helium valve closed
8/24/2012	1:45:15 PM	H2 valve closed
8/24/2012	1:45:15 PM	BCl3 valve closed
8/24/2012	1:45:15 PM	PH3 valve closed
8/24/2012	1:45:15 PM	SiCl4 pre valve closed
8/24/2012	1:45:15 PM	SiCl4 post valve closed
8/24/2012	1:45:15 PM	Main Vac valve closed
8/24/2012	1:45:15 PM	Bubbler valve closed
8/24/2012	1:45:15 PM	Bypass valve opened
8/24/2012	1:45:15 PM	Helium MFC set to  0.000000
8/24/2012	1:45:15 PM	H2 MFC set to  0.000000
8/24/2012	1:45:15 PM	BCl3 MFC set to  0.000000
8/24/2012	1:45:15 PM	PH3 MFC set to  0.000000
8/24/2012	1:45:15 PM	SiCl4 MFC set to  0.000000
8/24/2012	1:45:15 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	1:45:15 PM	Tube furnace set to 0
8/24/2012	1:46:35 PM	Helium valve closed
8/24/2012	1:46:35 PM	H2 valve closed
8/24/2012	1:46:35 PM	BCl3 valve closed
8/24/2012	1:46:35 PM	PH3 valve closed
8/24/2012	1:46:35 PM	SiCl4 pre valve closed
8/24/2012	1:46:35 PM	SiCl4 post valve closed
8/24/2012	1:46:35 PM	Main Vac valve closed
8/24/2012	1:46:35 PM	Bubbler valve closed
8/24/2012	1:46:35 PM	Bypass valve opened
8/24/2012	1:46:35 PM	Helium MFC set to  0.000000
8/24/2012	1:46:35 PM	H2 MFC set to  0.000000
8/24/2012	1:46:35 PM	BCl3 MFC set to  0.000000
8/24/2012	1:46:35 PM	PH3 MFC set to  0.000000
8/24/2012	1:46:35 PM	SiCl4 MFC set to  0.000000
8/24/2012	1:46:35 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	1:46:35 PM	Tube furnace set to 0
8/24/2012	1:47:35 PM	Helium valve closed
8/24/2012	1:47:35 PM	H2 valve closed
8/24/2012	1:47:35 PM	BCl3 valve closed
8/24/2012	1:47:35 PM	PH3 valve closed
8/24/2012	1:47:35 PM	SiCl4 pre valve closed
8/24/2012	1:47:35 PM	SiCl4 post valve closed
8/24/2012	1:47:35 PM	Bypass valve closed
8/24/2012	1:47:35 PM	Bubbler valve closed
8/24/2012	1:47:35 PM	Main Vac valve opened
8/24/2012	1:47:35 PM	Helium MFC set to  0.000000
8/24/2012	1:47:35 PM	H2 MFC set to  0.000000
8/24/2012	1:47:35 PM	BCl3 MFC set to  0.000000
8/24/2012	1:47:35 PM	PH3 MFC set to  0.000000
8/24/2012	1:47:35 PM	SiCl4 MFC set to  0.000000
8/24/2012	1:47:35 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	1:47:35 PM	Tube furnace set to 0
8/24/2012	1:47:36 PM	Run finished at 1:47 PM
8/24/2012	1:47:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2012	2:08:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/24/2012	2:08:39 PM	Recipe started at 2:08 PM
8/24/2012	2:08:39 PM	Helium valve closed
8/24/2012	2:08:39 PM	H2 valve closed
8/24/2012	2:08:39 PM	BCl3 valve closed
8/24/2012	2:08:39 PM	PH3 valve closed
8/24/2012	2:08:39 PM	SiCl4 pre valve closed
8/24/2012	2:08:39 PM	SiCl4 post valve closed
8/24/2012	2:08:39 PM	Main Vac valve closed
8/24/2012	2:08:39 PM	Bubbler valve closed
8/24/2012	2:08:39 PM	Bypass valve opened
8/24/2012	2:08:39 PM	Helium MFC set to  0.000000
8/24/2012	2:08:39 PM	H2 MFC set to  0.000000
8/24/2012	2:08:39 PM	BCl3 MFC set to  0.000000
8/24/2012	2:08:39 PM	PH3 MFC set to  0.000000
8/24/2012	2:08:39 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:08:39 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:08:40 PM	Tube furnace set to 0
8/24/2012	2:08:40 PM	Helium valve closed
8/24/2012	2:08:40 PM	H2 valve closed
8/24/2012	2:08:40 PM	BCl3 valve closed
8/24/2012	2:08:40 PM	PH3 valve closed
8/24/2012	2:08:40 PM	SiCl4 pre valve closed
8/24/2012	2:08:40 PM	SiCl4 post valve closed
8/24/2012	2:08:40 PM	Main Vac valve closed
8/24/2012	2:08:40 PM	Bubbler valve closed
8/24/2012	2:08:40 PM	Bypass valve opened
8/24/2012	2:08:40 PM	Helium MFC set to  0.000000
8/24/2012	2:08:40 PM	H2 MFC set to  0.000000
8/24/2012	2:08:40 PM	BCl3 MFC set to  0.000000
8/24/2012	2:08:40 PM	PH3 MFC set to  0.000000
8/24/2012	2:08:40 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:08:40 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:08:40 PM	Tube furnace set to 0
8/24/2012	2:08:44 PM	Helium valve closed
8/24/2012	2:08:44 PM	H2 valve closed
8/24/2012	2:08:44 PM	BCl3 valve closed
8/24/2012	2:08:44 PM	PH3 valve closed
8/24/2012	2:08:44 PM	SiCl4 pre valve closed
8/24/2012	2:08:44 PM	SiCl4 post valve closed
8/24/2012	2:08:44 PM	Bypass valve closed
8/24/2012	2:08:44 PM	Bubbler valve closed
8/24/2012	2:08:44 PM	Main Vac valve opened
8/24/2012	2:08:44 PM	Helium MFC set to  0.000000
8/24/2012	2:08:44 PM	H2 MFC set to  0.000000
8/24/2012	2:08:44 PM	BCl3 MFC set to  0.000000
8/24/2012	2:08:44 PM	PH3 MFC set to  0.000000
8/24/2012	2:08:44 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:08:44 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:08:44 PM	Tube furnace set to 0
8/24/2012	2:09:14 PM	H2 valve closed
8/24/2012	2:09:14 PM	BCl3 valve closed
8/24/2012	2:09:14 PM	PH3 valve closed
8/24/2012	2:09:14 PM	SiCl4 pre valve closed
8/24/2012	2:09:14 PM	SiCl4 post valve closed
8/24/2012	2:09:14 PM	Bypass valve closed
8/24/2012	2:09:14 PM	Bubbler valve closed
8/24/2012	2:09:14 PM	Helium valve opened
8/24/2012	2:09:14 PM	Main Vac valve opened
8/24/2012	2:09:14 PM	Helium MFC set to  20.000000
8/24/2012	2:09:14 PM	H2 MFC set to  0.000000
8/24/2012	2:09:14 PM	BCl3 MFC set to  0.000000
8/24/2012	2:09:14 PM	PH3 MFC set to  0.000000
8/24/2012	2:09:14 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:09:14 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:09:14 PM	Tube furnace set to 0
8/24/2012	2:09:44 PM	Helium valve closed
8/24/2012	2:09:44 PM	H2 valve closed
8/24/2012	2:09:44 PM	BCl3 valve closed
8/24/2012	2:09:44 PM	PH3 valve closed
8/24/2012	2:09:44 PM	SiCl4 pre valve closed
8/24/2012	2:09:44 PM	SiCl4 post valve closed
8/24/2012	2:09:44 PM	Bypass valve closed
8/24/2012	2:09:44 PM	Bubbler valve closed
8/24/2012	2:09:44 PM	Main Vac valve opened
8/24/2012	2:09:44 PM	Helium MFC set to  0.000000
8/24/2012	2:09:44 PM	H2 MFC set to  0.000000
8/24/2012	2:09:44 PM	BCl3 MFC set to  0.000000
8/24/2012	2:09:44 PM	PH3 MFC set to  0.000000
8/24/2012	2:09:44 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:09:44 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:09:45 PM	Tube furnace set to 0
8/24/2012	2:10:15 PM	H2 valve closed
8/24/2012	2:10:15 PM	BCl3 valve closed
8/24/2012	2:10:15 PM	PH3 valve closed
8/24/2012	2:10:15 PM	SiCl4 pre valve closed
8/24/2012	2:10:15 PM	SiCl4 post valve closed
8/24/2012	2:10:15 PM	Bypass valve closed
8/24/2012	2:10:15 PM	Bubbler valve closed
8/24/2012	2:10:15 PM	Helium valve opened
8/24/2012	2:10:15 PM	Main Vac valve opened
8/24/2012	2:10:15 PM	Helium MFC set to  20.000000
8/24/2012	2:10:15 PM	H2 MFC set to  0.000000
8/24/2012	2:10:15 PM	BCl3 MFC set to  0.000000
8/24/2012	2:10:15 PM	PH3 MFC set to  0.000000
8/24/2012	2:10:15 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:10:15 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:10:15 PM	Tube furnace set to 0
8/24/2012	2:10:45 PM	Helium valve closed
8/24/2012	2:10:45 PM	H2 valve closed
8/24/2012	2:10:45 PM	BCl3 valve closed
8/24/2012	2:10:45 PM	PH3 valve closed
8/24/2012	2:10:45 PM	SiCl4 pre valve closed
8/24/2012	2:10:45 PM	SiCl4 post valve closed
8/24/2012	2:10:45 PM	Bypass valve closed
8/24/2012	2:10:45 PM	Bubbler valve closed
8/24/2012	2:10:45 PM	Main Vac valve opened
8/24/2012	2:10:45 PM	Helium MFC set to  0.000000
8/24/2012	2:10:45 PM	H2 MFC set to  0.000000
8/24/2012	2:10:45 PM	BCl3 MFC set to  0.000000
8/24/2012	2:10:45 PM	PH3 MFC set to  0.000000
8/24/2012	2:10:45 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:10:45 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:10:45 PM	Tube furnace set to 0
8/24/2012	2:11:15 PM	H2 valve closed
8/24/2012	2:11:15 PM	BCl3 valve closed
8/24/2012	2:11:15 PM	PH3 valve closed
8/24/2012	2:11:15 PM	SiCl4 pre valve closed
8/24/2012	2:11:15 PM	SiCl4 post valve closed
8/24/2012	2:11:15 PM	Bypass valve closed
8/24/2012	2:11:15 PM	Bubbler valve closed
8/24/2012	2:11:15 PM	Helium valve opened
8/24/2012	2:11:15 PM	Main Vac valve opened
8/24/2012	2:11:15 PM	Helium MFC set to  20.000000
8/24/2012	2:11:15 PM	H2 MFC set to  0.000000
8/24/2012	2:11:15 PM	BCl3 MFC set to  0.000000
8/24/2012	2:11:15 PM	PH3 MFC set to  0.000000
8/24/2012	2:11:15 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:11:15 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:11:15 PM	Tube furnace set to 0
8/24/2012	2:11:45 PM	Helium valve closed
8/24/2012	2:11:45 PM	H2 valve closed
8/24/2012	2:11:45 PM	BCl3 valve closed
8/24/2012	2:11:45 PM	PH3 valve closed
8/24/2012	2:11:45 PM	SiCl4 pre valve closed
8/24/2012	2:11:45 PM	SiCl4 post valve closed
8/24/2012	2:11:45 PM	Bypass valve closed
8/24/2012	2:11:45 PM	Bubbler valve closed
8/24/2012	2:11:45 PM	Main Vac valve opened
8/24/2012	2:11:45 PM	Helium MFC set to  0.000000
8/24/2012	2:11:45 PM	H2 MFC set to  0.000000
8/24/2012	2:11:45 PM	BCl3 MFC set to  0.000000
8/24/2012	2:11:45 PM	PH3 MFC set to  0.000000
8/24/2012	2:11:45 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:11:45 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:11:46 PM	Tube furnace set to 0
8/24/2012	2:12:16 PM	H2 valve closed
8/24/2012	2:12:16 PM	BCl3 valve closed
8/24/2012	2:12:16 PM	PH3 valve closed
8/24/2012	2:12:16 PM	SiCl4 pre valve closed
8/24/2012	2:12:16 PM	SiCl4 post valve closed
8/24/2012	2:12:16 PM	Bypass valve closed
8/24/2012	2:12:16 PM	Bubbler valve closed
8/24/2012	2:12:16 PM	Helium valve opened
8/24/2012	2:12:16 PM	Main Vac valve opened
8/24/2012	2:12:16 PM	Helium MFC set to  20.000000
8/24/2012	2:12:16 PM	H2 MFC set to  0.000000
8/24/2012	2:12:16 PM	BCl3 MFC set to  0.000000
8/24/2012	2:12:16 PM	PH3 MFC set to  0.000000
8/24/2012	2:12:16 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:12:16 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:12:16 PM	Tube furnace set to 0
8/24/2012	2:12:46 PM	Helium valve closed
8/24/2012	2:12:46 PM	H2 valve closed
8/24/2012	2:12:46 PM	BCl3 valve closed
8/24/2012	2:12:46 PM	PH3 valve closed
8/24/2012	2:12:46 PM	SiCl4 pre valve closed
8/24/2012	2:12:46 PM	SiCl4 post valve closed
8/24/2012	2:12:46 PM	Bypass valve closed
8/24/2012	2:12:46 PM	Bubbler valve closed
8/24/2012	2:12:46 PM	Main Vac valve opened
8/24/2012	2:12:46 PM	Helium MFC set to  0.000000
8/24/2012	2:12:46 PM	H2 MFC set to  0.000000
8/24/2012	2:12:46 PM	BCl3 MFC set to  0.000000
8/24/2012	2:12:46 PM	PH3 MFC set to  0.000000
8/24/2012	2:12:46 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:12:46 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:12:46 PM	Tube furnace set to 0
8/24/2012	2:13:16 PM	H2 valve closed
8/24/2012	2:13:16 PM	BCl3 valve closed
8/24/2012	2:13:16 PM	PH3 valve closed
8/24/2012	2:13:16 PM	SiCl4 pre valve closed
8/24/2012	2:13:16 PM	SiCl4 post valve closed
8/24/2012	2:13:16 PM	Bypass valve closed
8/24/2012	2:13:16 PM	Bubbler valve closed
8/24/2012	2:13:16 PM	Helium valve opened
8/24/2012	2:13:16 PM	Main Vac valve opened
8/24/2012	2:13:16 PM	Helium MFC set to  20.000000
8/24/2012	2:13:16 PM	H2 MFC set to  0.000000
8/24/2012	2:13:16 PM	BCl3 MFC set to  0.000000
8/24/2012	2:13:16 PM	PH3 MFC set to  0.000000
8/24/2012	2:13:16 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:13:16 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:13:16 PM	Tube furnace set to 0
8/24/2012	2:13:46 PM	Helium valve closed
8/24/2012	2:13:46 PM	H2 valve closed
8/24/2012	2:13:46 PM	BCl3 valve closed
8/24/2012	2:13:46 PM	PH3 valve closed
8/24/2012	2:13:46 PM	SiCl4 pre valve closed
8/24/2012	2:13:46 PM	SiCl4 post valve closed
8/24/2012	2:13:46 PM	Bypass valve closed
8/24/2012	2:13:46 PM	Bubbler valve closed
8/24/2012	2:13:46 PM	Main Vac valve opened
8/24/2012	2:13:46 PM	Helium MFC set to  0.000000
8/24/2012	2:13:46 PM	H2 MFC set to  0.000000
8/24/2012	2:13:46 PM	BCl3 MFC set to  0.000000
8/24/2012	2:13:46 PM	PH3 MFC set to  0.000000
8/24/2012	2:13:46 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:13:46 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:13:46 PM	Tube furnace set to 0
8/24/2012	2:14:16 PM	H2 valve closed
8/24/2012	2:14:17 PM	BCl3 valve closed
8/24/2012	2:14:17 PM	PH3 valve closed
8/24/2012	2:14:17 PM	SiCl4 pre valve closed
8/24/2012	2:14:17 PM	SiCl4 post valve closed
8/24/2012	2:14:17 PM	Bypass valve closed
8/24/2012	2:14:17 PM	Bubbler valve closed
8/24/2012	2:14:17 PM	Helium valve opened
8/24/2012	2:14:17 PM	Main Vac valve opened
8/24/2012	2:14:17 PM	Helium MFC set to  20.000000
8/24/2012	2:14:17 PM	H2 MFC set to  0.000000
8/24/2012	2:14:17 PM	BCl3 MFC set to  0.000000
8/24/2012	2:14:17 PM	PH3 MFC set to  0.000000
8/24/2012	2:14:17 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:14:17 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:14:17 PM	Tube furnace set to 0
8/24/2012	2:14:47 PM	Helium valve closed
8/24/2012	2:14:47 PM	H2 valve closed
8/24/2012	2:14:47 PM	BCl3 valve closed
8/24/2012	2:14:47 PM	PH3 valve closed
8/24/2012	2:14:47 PM	SiCl4 pre valve closed
8/24/2012	2:14:47 PM	SiCl4 post valve closed
8/24/2012	2:14:47 PM	Bypass valve closed
8/24/2012	2:14:47 PM	Bubbler valve closed
8/24/2012	2:14:47 PM	Main Vac valve opened
8/24/2012	2:14:47 PM	Helium MFC set to  0.000000
8/24/2012	2:14:47 PM	H2 MFC set to  0.000000
8/24/2012	2:14:47 PM	BCl3 MFC set to  0.000000
8/24/2012	2:14:47 PM	PH3 MFC set to  0.000000
8/24/2012	2:14:47 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:14:47 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:14:47 PM	Tube furnace set to 0
8/24/2012	2:15:17 PM	H2 valve closed
8/24/2012	2:15:17 PM	BCl3 valve closed
8/24/2012	2:15:17 PM	PH3 valve closed
8/24/2012	2:15:17 PM	SiCl4 pre valve closed
8/24/2012	2:15:17 PM	SiCl4 post valve closed
8/24/2012	2:15:17 PM	Bypass valve closed
8/24/2012	2:15:17 PM	Bubbler valve closed
8/24/2012	2:15:17 PM	Helium valve opened
8/24/2012	2:15:17 PM	Main Vac valve opened
8/24/2012	2:15:17 PM	Helium MFC set to  20.000000
8/24/2012	2:15:17 PM	H2 MFC set to  0.000000
8/24/2012	2:15:17 PM	BCl3 MFC set to  0.000000
8/24/2012	2:15:17 PM	PH3 MFC set to  0.000000
8/24/2012	2:15:17 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:15:17 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:15:17 PM	Tube furnace set to 0
8/24/2012	2:15:47 PM	Helium valve closed
8/24/2012	2:15:47 PM	H2 valve closed
8/24/2012	2:15:47 PM	BCl3 valve closed
8/24/2012	2:15:47 PM	PH3 valve closed
8/24/2012	2:15:47 PM	SiCl4 pre valve closed
8/24/2012	2:15:47 PM	SiCl4 post valve closed
8/24/2012	2:15:47 PM	Bypass valve closed
8/24/2012	2:15:47 PM	Bubbler valve closed
8/24/2012	2:15:47 PM	Main Vac valve opened
8/24/2012	2:15:47 PM	Helium MFC set to  0.000000
8/24/2012	2:15:47 PM	H2 MFC set to  0.000000
8/24/2012	2:15:47 PM	BCl3 MFC set to  0.000000
8/24/2012	2:15:47 PM	PH3 MFC set to  0.000000
8/24/2012	2:15:47 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:15:47 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:15:47 PM	Tube furnace set to 0
8/24/2012	2:16:17 PM	H2 valve closed
8/24/2012	2:16:17 PM	BCl3 valve closed
8/24/2012	2:16:17 PM	PH3 valve closed
8/24/2012	2:16:17 PM	SiCl4 pre valve closed
8/24/2012	2:16:17 PM	SiCl4 post valve closed
8/24/2012	2:16:17 PM	Bypass valve closed
8/24/2012	2:16:17 PM	Bubbler valve closed
8/24/2012	2:16:17 PM	Helium valve opened
8/24/2012	2:16:18 PM	Main Vac valve opened
8/24/2012	2:16:18 PM	Helium MFC set to  20.000000
8/24/2012	2:16:18 PM	H2 MFC set to  0.000000
8/24/2012	2:16:18 PM	BCl3 MFC set to  0.000000
8/24/2012	2:16:18 PM	PH3 MFC set to  0.000000
8/24/2012	2:16:18 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:16:18 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:16:18 PM	Tube furnace set to 0
8/24/2012	2:16:48 PM	Helium valve closed
8/24/2012	2:16:48 PM	H2 valve closed
8/24/2012	2:16:48 PM	BCl3 valve closed
8/24/2012	2:16:48 PM	PH3 valve closed
8/24/2012	2:16:48 PM	SiCl4 pre valve closed
8/24/2012	2:16:48 PM	SiCl4 post valve closed
8/24/2012	2:16:48 PM	Bypass valve closed
8/24/2012	2:16:48 PM	Bubbler valve closed
8/24/2012	2:16:48 PM	Main Vac valve opened
8/24/2012	2:16:48 PM	Helium MFC set to  0.000000
8/24/2012	2:16:48 PM	H2 MFC set to  0.000000
8/24/2012	2:16:48 PM	BCl3 MFC set to  0.000000
8/24/2012	2:16:48 PM	PH3 MFC set to  0.000000
8/24/2012	2:16:48 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:16:48 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:16:48 PM	Tube furnace set to 0
8/24/2012	2:17:18 PM	H2 valve closed
8/24/2012	2:17:18 PM	BCl3 valve closed
8/24/2012	2:17:18 PM	PH3 valve closed
8/24/2012	2:17:18 PM	SiCl4 pre valve closed
8/24/2012	2:17:18 PM	SiCl4 post valve closed
8/24/2012	2:17:18 PM	Bypass valve closed
8/24/2012	2:17:18 PM	Bubbler valve closed
8/24/2012	2:17:18 PM	Helium valve opened
8/24/2012	2:17:18 PM	Main Vac valve opened
8/24/2012	2:17:18 PM	Helium MFC set to  20.000000
8/24/2012	2:17:18 PM	H2 MFC set to  0.000000
8/24/2012	2:17:18 PM	BCl3 MFC set to  0.000000
8/24/2012	2:17:18 PM	PH3 MFC set to  0.000000
8/24/2012	2:17:18 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:17:18 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:17:18 PM	Tube furnace set to 0
8/24/2012	2:17:48 PM	Helium valve closed
8/24/2012	2:17:48 PM	H2 valve closed
8/24/2012	2:17:48 PM	BCl3 valve closed
8/24/2012	2:17:48 PM	PH3 valve closed
8/24/2012	2:17:48 PM	SiCl4 pre valve closed
8/24/2012	2:17:48 PM	SiCl4 post valve closed
8/24/2012	2:17:48 PM	Bypass valve closed
8/24/2012	2:17:48 PM	Bubbler valve closed
8/24/2012	2:17:48 PM	Main Vac valve opened
8/24/2012	2:17:48 PM	Helium MFC set to  0.000000
8/24/2012	2:17:48 PM	H2 MFC set to  0.000000
8/24/2012	2:17:48 PM	BCl3 MFC set to  0.000000
8/24/2012	2:17:48 PM	PH3 MFC set to  0.000000
8/24/2012	2:17:48 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:17:48 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:17:48 PM	Tube furnace set to 0
8/24/2012	2:18:18 PM	H2 valve closed
8/24/2012	2:18:18 PM	BCl3 valve closed
8/24/2012	2:18:18 PM	PH3 valve closed
8/24/2012	2:18:18 PM	SiCl4 pre valve closed
8/24/2012	2:18:18 PM	SiCl4 post valve closed
8/24/2012	2:18:18 PM	Bypass valve closed
8/24/2012	2:18:18 PM	Bubbler valve closed
8/24/2012	2:18:18 PM	Helium valve opened
8/24/2012	2:18:18 PM	Main Vac valve opened
8/24/2012	2:18:18 PM	Helium MFC set to  20.000000
8/24/2012	2:18:18 PM	H2 MFC set to  0.000000
8/24/2012	2:18:18 PM	BCl3 MFC set to  0.000000
8/24/2012	2:18:18 PM	PH3 MFC set to  0.000000
8/24/2012	2:18:18 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:18:18 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:18:19 PM	Tube furnace set to 0
8/24/2012	2:18:49 PM	Helium valve closed
8/24/2012	2:18:49 PM	H2 valve closed
8/24/2012	2:18:49 PM	BCl3 valve closed
8/24/2012	2:18:49 PM	PH3 valve closed
8/24/2012	2:18:49 PM	SiCl4 pre valve closed
8/24/2012	2:18:49 PM	SiCl4 post valve closed
8/24/2012	2:18:49 PM	Bypass valve closed
8/24/2012	2:18:49 PM	Bubbler valve closed
8/24/2012	2:18:49 PM	Main Vac valve opened
8/24/2012	2:18:49 PM	Helium MFC set to  0.000000
8/24/2012	2:18:49 PM	H2 MFC set to  0.000000
8/24/2012	2:18:49 PM	BCl3 MFC set to  0.000000
8/24/2012	2:18:49 PM	PH3 MFC set to  0.000000
8/24/2012	2:18:49 PM	SiCl4 MFC set to  0.000000
8/24/2012	2:18:49 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	2:18:49 PM	Tube furnace set to 0
8/24/2012	2:18:50 PM	Run finished at 2:18 PM
8/24/2012	2:18:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/24/2012	3:12:33 PM	Recipe started at 3:12 PM
8/24/2012	3:12:33 PM	Helium valve closed
8/24/2012	3:12:33 PM	H2 valve closed
8/24/2012	3:12:33 PM	BCl3 valve closed
8/24/2012	3:12:33 PM	PH3 valve closed
8/24/2012	3:12:33 PM	SiCl4 pre valve closed
8/24/2012	3:12:33 PM	SiCl4 post valve closed
8/24/2012	3:12:33 PM	Main Vac valve closed
8/24/2012	3:12:33 PM	Bypass valve closed
8/24/2012	3:12:33 PM	Bubbler valve closed
8/24/2012	3:12:33 PM	Helium MFC set to  0.000000
8/24/2012	3:12:33 PM	H2 MFC set to  0.000000
8/24/2012	3:12:33 PM	BCl3 MFC set to  0.000000
8/24/2012	3:12:33 PM	PH3 MFC set to  0.000000
8/24/2012	3:12:33 PM	SiCl4 MFC set to  0.000000
8/24/2012	3:12:33 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	3:12:34 PM	Tube furnace set to 0
8/24/2012	3:12:37 PM	Helium valve closed
8/24/2012	3:12:37 PM	BCl3 valve closed
8/24/2012	3:12:37 PM	PH3 valve closed
8/24/2012	3:12:37 PM	SiCl4 pre valve closed
8/24/2012	3:12:37 PM	SiCl4 post valve closed
8/24/2012	3:12:37 PM	Main Vac valve closed
8/24/2012	3:12:37 PM	Bypass valve closed
8/24/2012	3:12:37 PM	Bubbler valve closed
8/24/2012	3:12:37 PM	H2 valve opened
8/24/2012	3:12:37 PM	Helium MFC set to  0.000000
8/24/2012	3:12:37 PM	H2 MFC set to  500.000000
8/24/2012	3:12:37 PM	BCl3 MFC set to  0.000000
8/24/2012	3:12:37 PM	PH3 MFC set to  0.000000
8/24/2012	3:12:37 PM	SiCl4 MFC set to  0.000000
8/24/2012	3:12:37 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	3:12:37 PM	Tube furnace set to 0
8/24/2012	3:13:52 PM	Helium valve closed
8/24/2012	3:13:52 PM	BCl3 valve closed
8/24/2012	3:13:52 PM	PH3 valve closed
8/24/2012	3:13:52 PM	SiCl4 pre valve closed
8/24/2012	3:13:52 PM	SiCl4 post valve closed
8/24/2012	3:13:52 PM	Main Vac valve closed
8/24/2012	3:13:52 PM	Bypass valve closed
8/24/2012	3:13:52 PM	H2 valve opened
8/24/2012	3:13:52 PM	Bubbler valve opened
8/24/2012	3:13:52 PM	Helium MFC set to  0.000000
8/24/2012	3:13:52 PM	H2 MFC set to  500.000000
8/24/2012	3:13:52 PM	BCl3 MFC set to  0.000000
8/24/2012	3:13:52 PM	PH3 MFC set to  0.000000
8/24/2012	3:13:52 PM	SiCl4 MFC set to  0.000000
8/24/2012	3:13:52 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	3:13:52 PM	Tube furnace set to 0
8/24/2012	3:13:53 PM	Helium valve closed
8/24/2012	3:13:53 PM	BCl3 valve closed
8/24/2012	3:13:53 PM	PH3 valve closed
8/24/2012	3:13:53 PM	SiCl4 pre valve closed
8/24/2012	3:13:53 PM	SiCl4 post valve closed
8/24/2012	3:13:53 PM	Main Vac valve closed
8/24/2012	3:13:53 PM	Bypass valve closed
8/24/2012	3:13:53 PM	H2 valve opened
8/24/2012	3:13:53 PM	Bubbler valve opened
8/24/2012	3:13:53 PM	Helium MFC set to  0.000000
8/24/2012	3:13:53 PM	H2 MFC set to  500.000000
8/24/2012	3:13:53 PM	BCl3 MFC set to  0.000000
8/24/2012	3:13:53 PM	PH3 MFC set to  0.000000
8/24/2012	3:13:53 PM	SiCl4 MFC set to  0.000000
8/24/2012	3:13:53 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	3:13:53 PM	Tube furnace set to 1000
8/24/2012	3:33:53 PM	Helium valve closed
8/24/2012	3:33:53 PM	PH3 valve closed
8/24/2012	3:33:53 PM	Main Vac valve closed
8/24/2012	3:33:53 PM	Bypass valve closed
8/24/2012	3:33:53 PM	H2 valve opened
8/24/2012	3:33:53 PM	BCl3 valve opened
8/24/2012	3:33:53 PM	SiCl4 pre valve opened
8/24/2012	3:33:53 PM	SiCl4 post valve opened
8/24/2012	3:33:53 PM	Bubbler valve opened
8/24/2012	3:33:53 PM	Helium MFC set to  0.000000
8/24/2012	3:33:53 PM	H2 MFC set to  450.000000
8/24/2012	3:33:53 PM	BCl3 MFC set to  1.300000
8/24/2012	3:33:53 PM	PH3 MFC set to  0.000000
8/24/2012	3:33:53 PM	SiCl4 MFC set to  50.000000
8/24/2012	3:33:53 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	3:33:53 PM	Tube furnace set to 1000
8/24/2012	3:50:53 PM	Helium valve closed
8/24/2012	3:50:53 PM	BCl3 valve closed
8/24/2012	3:50:53 PM	PH3 valve closed
8/24/2012	3:50:53 PM	SiCl4 pre valve closed
8/24/2012	3:50:53 PM	SiCl4 post valve closed
8/24/2012	3:50:53 PM	Main Vac valve closed
8/24/2012	3:50:53 PM	Bypass valve closed
8/24/2012	3:50:53 PM	H2 valve opened
8/24/2012	3:50:53 PM	Bubbler valve opened
8/24/2012	3:50:53 PM	Helium MFC set to  0.000000
8/24/2012	3:50:53 PM	H2 MFC set to  500.000000
8/24/2012	3:50:53 PM	BCl3 MFC set to  0.000000
8/24/2012	3:50:53 PM	PH3 MFC set to  0.000000
8/24/2012	3:50:53 PM	SiCl4 MFC set to  0.000000
8/24/2012	3:50:53 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	3:50:53 PM	Tube furnace set to 750
8/24/2012	3:55:53 PM	H2 valve closed
8/24/2012	3:55:53 PM	BCl3 valve closed
8/24/2012	3:55:53 PM	PH3 valve closed
8/24/2012	3:55:54 PM	SiCl4 pre valve closed
8/24/2012	3:55:54 PM	SiCl4 post valve closed
8/24/2012	3:55:54 PM	Main Vac valve closed
8/24/2012	3:55:54 PM	Bypass valve closed
8/24/2012	3:55:54 PM	Helium valve opened
8/24/2012	3:55:54 PM	Bubbler valve opened
8/24/2012	3:55:54 PM	Helium MFC set to  500.000000
8/24/2012	3:55:54 PM	H2 MFC set to  0.000000
8/24/2012	3:55:54 PM	BCl3 MFC set to  0.000000
8/24/2012	3:55:54 PM	PH3 MFC set to  0.000000
8/24/2012	3:55:54 PM	SiCl4 MFC set to  0.000000
8/24/2012	3:55:54 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	3:55:54 PM	Tube furnace set to 0
8/24/2012	4:15:54 PM	Helium valve closed
8/24/2012	4:15:54 PM	H2 valve closed
8/24/2012	4:15:54 PM	BCl3 valve closed
8/24/2012	4:15:54 PM	PH3 valve closed
8/24/2012	4:15:54 PM	SiCl4 pre valve closed
8/24/2012	4:15:54 PM	SiCl4 post valve closed
8/24/2012	4:15:54 PM	Main Vac valve closed
8/24/2012	4:15:54 PM	Bypass valve closed
8/24/2012	4:15:54 PM	Bubbler valve closed
8/24/2012	4:15:54 PM	Helium MFC set to  0.000000
8/24/2012	4:15:54 PM	H2 MFC set to  0.000000
8/24/2012	4:15:54 PM	BCl3 MFC set to  0.000000
8/24/2012	4:15:54 PM	PH3 MFC set to  0.000000
8/24/2012	4:15:54 PM	SiCl4 MFC set to  0.000000
8/24/2012	4:15:54 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	4:15:54 PM	Tube furnace set to 0
8/24/2012	4:15:55 PM	Run finished at 4:15 PM
8/24/2012	4:24:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2012	4:24:18 PM	Recipe started at 4:24 PM
8/24/2012	4:24:18 PM	Helium valve closed
8/24/2012	4:24:18 PM	H2 valve closed
8/24/2012	4:24:18 PM	BCl3 valve closed
8/24/2012	4:24:18 PM	PH3 valve closed
8/24/2012	4:24:18 PM	SiCl4 pre valve closed
8/24/2012	4:24:18 PM	SiCl4 post valve closed
8/24/2012	4:24:18 PM	Main Vac valve closed
8/24/2012	4:24:18 PM	Bypass valve closed
8/24/2012	4:24:18 PM	Bubbler valve closed
8/24/2012	4:24:18 PM	Helium MFC set to  0.000000
8/24/2012	4:24:18 PM	H2 MFC set to  0.000000
8/24/2012	4:24:18 PM	BCl3 MFC set to  0.000000
8/24/2012	4:24:19 PM	PH3 MFC set to  0.000000
8/24/2012	4:24:19 PM	SiCl4 MFC set to  0.000000
8/24/2012	4:24:19 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	4:24:19 PM	Tube furnace set to 0
8/24/2012	4:24:22 PM	H2 valve closed
8/24/2012	4:24:22 PM	BCl3 valve closed
8/24/2012	4:24:22 PM	PH3 valve closed
8/24/2012	4:24:22 PM	SiCl4 pre valve closed
8/24/2012	4:24:22 PM	SiCl4 post valve closed
8/24/2012	4:24:22 PM	Main Vac valve closed
8/24/2012	4:24:22 PM	Bypass valve closed
8/24/2012	4:24:22 PM	Bubbler valve closed
8/24/2012	4:24:22 PM	Helium valve opened
8/24/2012	4:24:22 PM	Helium MFC set to  500.000000
8/24/2012	4:24:22 PM	H2 MFC set to  0.000000
8/24/2012	4:24:22 PM	BCl3 MFC set to  0.000000
8/24/2012	4:24:22 PM	PH3 MFC set to  0.000000
8/24/2012	4:24:22 PM	SiCl4 MFC set to  0.000000
8/24/2012	4:24:22 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	4:24:22 PM	Tube furnace set to 0
8/24/2012	4:24:22 PM	Helium valve closed
8/24/2012	4:24:22 PM	H2 valve closed
8/24/2012	4:24:22 PM	BCl3 valve closed
8/24/2012	4:24:22 PM	PH3 valve closed
8/24/2012	4:24:22 PM	SiCl4 pre valve closed
8/24/2012	4:24:22 PM	SiCl4 post valve closed
8/24/2012	4:24:22 PM	Main Vac valve closed
8/24/2012	4:24:22 PM	Bypass valve closed
8/24/2012	4:24:22 PM	Bubbler valve closed
8/24/2012	4:24:22 PM	Helium MFC set to  0.000000
8/24/2012	4:24:22 PM	H2 MFC set to  0.000000
8/24/2012	4:24:22 PM	BCl3 MFC set to  0.000000
8/24/2012	4:24:22 PM	PH3 MFC set to  0.000000
8/24/2012	4:24:22 PM	SiCl4 MFC set to  0.000000
8/24/2012	4:24:22 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	4:24:22 PM	Tube furnace set to 0
8/24/2012	4:24:23 PM	Run finished at 4:24 PM
8/24/2012	4:24:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2012	4:29:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2012	4:29:46 PM	Recipe started at 4:29 PM
8/24/2012	4:29:46 PM	Helium valve closed
8/24/2012	4:29:46 PM	H2 valve closed
8/24/2012	4:29:46 PM	BCl3 valve closed
8/24/2012	4:29:46 PM	PH3 valve closed
8/24/2012	4:29:46 PM	SiCl4 pre valve closed
8/24/2012	4:29:46 PM	SiCl4 post valve closed
8/24/2012	4:29:46 PM	Main Vac valve closed
8/24/2012	4:29:46 PM	Bubbler valve closed
8/24/2012	4:29:46 PM	Bypass valve opened
8/24/2012	4:29:46 PM	Helium MFC set to  0.000000
8/24/2012	4:29:46 PM	H2 MFC set to  0.000000
8/24/2012	4:29:46 PM	BCl3 MFC set to  0.000000
8/24/2012	4:29:46 PM	PH3 MFC set to  0.000000
8/24/2012	4:29:46 PM	SiCl4 MFC set to  0.000000
8/24/2012	4:29:46 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	4:29:46 PM	Tube furnace set to 0
8/24/2012	4:31:09 PM	Helium valve closed
8/24/2012	4:31:09 PM	H2 valve closed
8/24/2012	4:31:09 PM	BCl3 valve closed
8/24/2012	4:31:09 PM	PH3 valve closed
8/24/2012	4:31:09 PM	SiCl4 pre valve closed
8/24/2012	4:31:09 PM	SiCl4 post valve closed
8/24/2012	4:31:09 PM	Main Vac valve closed
8/24/2012	4:31:09 PM	Bubbler valve closed
8/24/2012	4:31:09 PM	Bypass valve opened
8/24/2012	4:31:09 PM	Helium MFC set to  0.000000
8/24/2012	4:31:09 PM	H2 MFC set to  0.000000
8/24/2012	4:31:09 PM	BCl3 MFC set to  0.000000
8/24/2012	4:31:09 PM	PH3 MFC set to  0.000000
8/24/2012	4:31:09 PM	SiCl4 MFC set to  0.000000
8/24/2012	4:31:09 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	4:31:10 PM	Tube furnace set to 0
8/24/2012	4:31:54 PM	Helium valve closed
8/24/2012	4:31:54 PM	H2 valve closed
8/24/2012	4:31:54 PM	BCl3 valve closed
8/24/2012	4:31:54 PM	PH3 valve closed
8/24/2012	4:31:54 PM	SiCl4 pre valve closed
8/24/2012	4:31:54 PM	SiCl4 post valve closed
8/24/2012	4:31:54 PM	Bypass valve closed
8/24/2012	4:31:54 PM	Bubbler valve closed
8/24/2012	4:31:54 PM	Main Vac valve opened
8/24/2012	4:31:54 PM	Helium MFC set to  0.000000
8/24/2012	4:31:54 PM	H2 MFC set to  0.000000
8/24/2012	4:31:54 PM	BCl3 MFC set to  0.000000
8/24/2012	4:31:54 PM	PH3 MFC set to  0.000000
8/24/2012	4:31:54 PM	SiCl4 MFC set to  0.000000
8/24/2012	4:31:54 PM	Bypass solenoid MFC set to  0.000000
8/24/2012	4:31:54 PM	Tube furnace set to 0
8/24/2012	4:31:55 PM	Run finished at 4:31 PM
8/24/2012	4:31:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
